1

B atomic layer doping of Ge

Year:
2010
Language:
english
File:
PDF, 499 KB
english, 2010
2

Selective vapor phase etching of SiGe versus Si by HCl

Year:
2008
Language:
english
File:
PDF, 267 KB
english, 2008
5

Selective vapor phase etching of SiGe by HCl in a RPCVD reactor

Year:
2008
Language:
english
File:
PDF, 378 KB
english, 2008
6

P doping control during SiGe:C epitaxy

Year:
2006
Language:
english
File:
PDF, 125 KB
english, 2006